Optical absolute linear sensor RESOLUTE UHV for use in ultrahigh vacuum

Production:: Renishaw plc (Graet Britain)

Renishaw RESOLUTE UHV encoder is a true absolute optical encoder designed specifically for use in ultrahigh vacuum applications (up to 10 ^-10 Torr).

RESOLUTE UHV encoder is manufactured from environmentally friendly materials and adhesives that are environmentally friendly and safe for use in ultrahigh vacuum environments, and therefore has a low level of gas evolution, the level of residual gases (RGA) confirmed by the studies, and a high sintering temperature (120 ° C).

RESOLUTE UHV encoder detects the position immediately after switching on, without the need for any movement or backup power. This means that full control of the axes can be achieved immediately, thereby eliminating the risks of uncontrolled movement or collision. This is an important advantage in applications such as the processing of semiconductor wafers, where the safe extraction of expensive products with sudden disconnection of the power supply is important.

The encoder RESOLUTE UHV is characterized by a very low subdivision error (SDE, ± 40 nm), which improves the quality of feedback. This in turn gives a number of advantages, including: minimizing the ripple speed, reducing vibration, increasing the scanning performance, reducing the amount of heat generated in the engines.

RESOLUTE UHV encoder also has a low jitter value (signal edge jitter, less than 10 nm), thereby significantly improving the positioning stability.

RESOLUTE UHV encoder has a separate built-in position verification algorithm, as well as control of speed, signal status and temperature, which ensures the internal safety of the system.

The encoder system RESOLUTE UHV is offered with a range of resolutions - up to 1 nm at the maximum speed - up to 100 m/s.

For the solution of various customer tasks, high-precision scales for the linear encoder RESOLUTE UHV are offered: from a fast and easy to install high-precision stainless steel scale - RTLA (± 5 μm / m) to the Invar scale - RELA - with very low coefficient of thermal expansion and certified accuracy higher than ± 1 μm.

The absolute encoder RESOLUTE UHV uses only the serial data transmission channel, which provides an excellent degree of noise immunity. The encoder provides performance with the support of a number of protocols, which makes it easy to connect it to many standard controllers, drives, digital display devices and counter cards (connected to a computer). The RESOLUTE UHV encoder with BiSS-C® protocol support is compatible with several manufacturers´ systems. The RESOLUTE UHV encoder with Panasonic protocol support is also offered.

Optical absolute linear encoder RESOLUTE UHV with RTLA scale in FASTRACK guides and with self-adhesive RTLA-S scale Production: Renishaw plc (Graet Britain)
	The FASTRACK system allows quick dismantling and replacement of the scale even in conditions of limited access, which makes it very convenient for large machine tools, separated into parts for transportation to the final installation site, or in places where there is a risk of damage. The FASTRACK system is designed for applications where a high-precision and easily removable scale is required.
Optical absolute linear encoder RESOLUTE UHV with high-precision RSLA scale in stainless steel Production: Renishaw plc (Graet Britain)
	The linear encoder system RESOLUTE UHV with the RSLA line gives a total error of less than ± 4 μm at 5 m - the best result in the industry! The RSLA line (available resolutions: 1, 5, 50 and 100 nm) is ideally suited for solving problems for large lengths that require high accuracy of measurements.
Optical absolute linear encoder RESOLUTE UHV with a high-precision RELA scale from Invar Production: Renishaw plc (Graet Britain)
	In cases where very high accuracy is required in combination with a "zero" thermal expansion coefficient, the RESOLUTE UHV encoders can be used with the absolute linear scale RELA (from Invar - an iron-nickel alloy with a low expansion factor). Due to the unique exceptional precision the Renishaw grading process of the RELA range has a certified accuracy of ± 1 μm at lengths up to 1.13 m!